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High-performance metal seal "HELICOFLEX" for semiconductor manufacturing equipment

Replace with elastomer seals! Introducing our metal seals.

"HELICOFLEX" is a high-performance metal seal for semiconductor manufacturing equipment. It is widely compatible with ultra-high vacuum (UHV), ultra-high purity (UHP), etching, CVD, and more. It is compatible with elastomer O-rings. Please feel free to contact us when you need assistance. 【Features】 ■ Ultra-high vacuum (UHV) and positive pressure applications ■ High heat resistance ■ Chemical resistance and corrosion resistance *For more details, please download the PDF or feel free to contact us.

  • 半導体製造装置用高機能メタルシール『ヘリコフレックスシール』2.JPG
  • Sealing

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